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Application Note for Leica EM TIC020, Leica EM TIC 3X – Electron backscattered diffraction (EBSD) is for example used to examine the crystallographic orientation of material. The sample preparation for such samples is sometimes very tricky as the depth of information is just few nm (~20nm or less). That means the sample surface must be flat and free of preparation artefacts. Mechanical polishing leads mostly to sample surfaces damages.