Cross-Sectional Preparation of Structured Semiconductor Materials for TEM

http://www.leica-microsystems.com/science-lab/cross-sectional-preparation-of-structured-semiconductor-materials-for-tem/

Application Note for Leica EM RES102 – The vertical layer construction of a semiconductor structure should be examined as a TEM cross-sectional sample. In addition to the specific preparation of the desired structure, the widely different sputter rates and atomic weights of the individual components represent the level of difficulty involved with this preparation problem.

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