Cross Sectioning of a Multilayer System – Preparation of a Perfect Sample Surface for EBSD

http://www.leica-microsystems.com/science-lab/cross-sectioning-of-a-multilayer-system-preparation-of-a-perfect-sample-surface-for-ebsd/

Application Note for Leica EM TIC 3X – Electron Backscattered Diffraction (EBSD) is a surface technique creating a diffraction pattern (Kikuchi-bands). It can be used for crystal orientation mapping, defect studies, phase identification, grain boundary studies and morphology studies. The information depth is just a few nm. Therefore good sample preparation is very important to avoid any damage. This is very difficult in case of multilayer system with big differences in hardness.

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